The 78th JSAP Autumn Meeting, 2017

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Poster presentation

3 Optics and Photonics » 3.2 Equipment optics and materials

[7a-PA3-1~17] 3.2 Equipment optics and materials

Thu. Sep 7, 2017 9:30 AM - 11:30 AM PA3 (P)

9:30 AM - 11:30 AM

[7a-PA3-7] Three-dimensional microfabrication in photoresist film using CW laser direct drawing with liquid immersion object lens

〇(M2)Shinji Nakata1, Chikara Egami1 (1.Shizuoka Univ.)

Keywords:Laser fabrication, Nonliner optics