The 78th JSAP Autumn Meeting, 2017

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Poster presentation

3 Optics and Photonics » 3.8 Optical measurement, instrumentation, and sensor

[7a-PA5-1~22] 3.8 Optical measurement, instrumentation, and sensor

Thu. Sep 7, 2017 9:30 AM - 11:30 AM PA5 (P)

9:30 AM - 11:30 AM

[7a-PA5-1] Nondestructive and noncontact measurements of semiconductor optical waveguide structure using visible light OCT

〇Kazumasa Ishida1, Nobuhiko Ozaki1, Naoki Ikeda2, Yoshimasa Sugimoto2 (1.Wakayama Univ., 2.NIMS)

Keywords:Optical coherence tomography, semiconductor optical waveguide