The 78th JSAP Autumn Meeting, 2017

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9 Applied Materials Science » 9.2 Nanowires and Nanoparticles

[7a-S44-1~9] 9.2 Nanowires and Nanoparticles

Thu. Sep 7, 2017 9:30 AM - 11:45 AM S44 (Conf. Room 5)

Shinjiroh Hara(Hokkaido Univ.)

11:30 AM - 11:45 AM

[7a-S44-9] Fabrication of Si/SiGe0.3 nano wire using Bio-template Ultimate Top-down Process and Its Thermal conductivity

〇AKIOU KIKUCHI2,4, AKIFUMI YAO4, ATSUSHI YAMAMOTO5, TAKAHITO ONO2, SEIJI SAMUKAWA1,3 (1.IFS, Tohoku Univ., 2.GSE, Tohoku Univ., 3.AIMR, Tohoku Univ., 4.Central glass Co. Ltd., 5.AIST)

Keywords:nano wire