The 78th JSAP Autumn Meeting, 2017

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Oral presentation

3 Optics and Photonics » 3.7 Laser processing

[7a-S45-1~8] 3.7 Laser processing

Thu. Sep 7, 2017 9:00 AM - 11:15 AM S45 (Conf. Room 6)

Tadatake Sato(AIST), Hiroyuki Wada(Titech)

9:15 AM - 9:30 AM

[7a-S45-2] TEM Analysis of Crystalline Defects Induced by Permeable Pulse Laser

〇Hiroyuki Iwata1, Hiroyasu Saka1, Daisuke Kawaguchi2 (1.Aichi Inst. Tech., 2.Hamamatsu Photonics)

Keywords:Stelth Dicing, TEM, void

The stealth dicing method in which a permeable pulse laser is focused inside a Si sample. The sample is cleaved with the modified layer as a starting point. But there are many unknown points such as its mechanism. We clarified the crystal structure of the modified layer using an UHV-TEM and attempted to elucidate the mechanism leading to fracture. It was found that the presence of voids, high pressure phase, and dislocation densities.