[7p-A201-1~10] Frontier of the research in dislocations

[7p-A201-4] Evaluation of Threading Mixed Dislocations in SiC by X-ray Topography

〇Katsuhiko Nakai¹, Tetsuya Nagai¹, Syuichi Moriwake¹, Kengo Noami¹, Toshiro Futagi¹ (1.NSST)

Keywords:4H-SiC, Threading Dislocation, X-ray Topography

Threading dislocations in 4H-SiC were evaluated by X-ray topography and TEM. Contrast dependence on reciprocal lattice vectors (g vector) revealed the existence of threading mixed dislocation with the Burgers vector of <1-100>+<0001>.