[7p-A201-1~10] Frontier of the research in dislocations

△ [7p-A201-6] Bright-Field X-ray Topography under Multiple-Diffraction Conditions Effective to Determine Burgers Vectors of Misfit Dislocations in Si.

〇(M2)Tetsuya Tsurumaru¹, Hiroyuki Mizuochi¹, Haruka Kamamoto¹, Yoshiyuki Tsusaka^1,2, Yasushi Kagoshima^1,2, Junji Matsui² (1.Univ. of Hyogo , Graduate School of Material Sci., 2.Syn. Rad. Nano-Tech. Center)

Keywords:X-ray topography, dislocation

Bright field X-ray topography can reveal the crystal defects such as dislocations without large shape deformation of the images by using transmitted X-rays instead of diffracted X-rays. We employed this method under multiple-diffraction conditions to determine precise Burgers vectors (generally known as a/2<110>) of misfit dislocations in Si wafers. The present X-ray topographic technique is effective to suppress troublesome dislocation image deformation of the diffracted images.