[7p-A409-6~11] 【CS.3】3.9 & 4.7 Code-sharing session

▲ [7p-A409-6] Enhanced sensitivity of MEMS bolometers by introducing two-dimensional phononic crystal structures

〇(PC)Ya Zhang¹, Boqi Qiu¹, Naomi Nagai¹, Masahiro Nomura^1,2, Kazuhiko Hirakawa^1,2 (1.IIS, Univ. of Tokyo, 2.INQIE, University of Tokyo)

Keywords:terahertz detector, MEMS resonator, Phononic crystal

In this work, we have fabricated two-dimensional phononic crystal (PnC) structures on the MEMS beam resonators to enhance their thermal sensitivities. The introducing of the PnC structure enhances phonon scattering and reduces the thermal conductance of the beam, therefore increases the thermal sensitivity of the MEMS resonator. The PnCs are fabricated on the beam resonators by electron beam lithography and reactive ion etching. We measured the shifts in the resonance frequencies of the beams as a function of the applied heating power. The samples with PnC show larger thermal sensitivities (1.6~2 times) than that of the reference sample without PnC, indicating effectiveness of PnCs for thermal sensing applications.