1:15 PM - 1:30 PM
[7p-A411-1] Development on the particle number concentration standard in liquid with the simultaneous measurement of the mass of suspension type optical particle counter with a pulse height analyzer expansion to 600 nm range
Keywords:particle concentration, uncertainty, primary standard
AIST has developed a primary standard of number concentrations of liquid-borne particles from 2 µm - 20 µm to 600 nm in diameter of particles on the concentration range 5×102 /g - 2×106 /g.
In the result on 603 nm diameter particle sample suspension, a number concentration 2899 /mg, expanded uncertainty 68 /mg was obtained. The main part of the uncertainty was the statistical variation in the number of particles contained in a suspension. The OPC result was found to agree within the uncertainty with the measurement result obtained independently by the SEM method such as a number concentration 2900 /mg, expanded uncertainty 24 /mg, and the validity of the primary standard should be confirmed.
In the result on 603 nm diameter particle sample suspension, a number concentration 2899 /mg, expanded uncertainty 68 /mg was obtained. The main part of the uncertainty was the statistical variation in the number of particles contained in a suspension. The OPC result was found to agree within the uncertainty with the measurement result obtained independently by the SEM method such as a number concentration 2900 /mg, expanded uncertainty 24 /mg, and the validity of the primary standard should be confirmed.