[7p-A412-1~12] 6.2 Carbon-based thin films

[7p-A412-2] Analysis of the bonding states of a-CN_x:H films with high-nitrogen content fabricated from the microwave-plasma discharge of the gas mixture of hexane with N₂

〇Haruhiko Ito¹, Kenya Hiramatsu¹, Dong Fu¹, Hidetoshi Saitoh¹ (1.Nagaoka Univ. Tech.)

Keywords:amorphous carbon nitride