[7p-A412-1~12] 6.2 Carbon-based thin films

△ [7p-A412-7] Electrical Resistivity and Friction Coefficient of Laminated DLC/N-DLC Film

〇Yushi Iijima¹, Ryo Isono¹, Satoshi Degai¹, Toru Harigai¹, Tsuyoshi Tanimoto¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Haruyuki Yasui², Satoru Kaneko³, Shinsuke Kunitsugu⁴, Masao Kamiya⁵, Makoto Taki⁶ (1.Toyohashi Univ. Technol., 2.Ind. Res. Inst. of Ishikawa, 3.Kanagawa Inst. of Ind. Sci. Technol., 4.Ind. Technol. Cent. of Okayama, 5.Itoh Opt. Ind. Co., Ltd., 6.Onward Ceram. Coat. Co., Ltd.)

Keywords:diamond-like carbon, lamination, friction

The DLC film has excellent characteristics such as high hardness and low friction but low conductivity. On the other hand, the DLC (N-DLC) film containing nitrogen in the DLC film has improved conductivity but low wear resistance. In this study, as a hard coating film having both wear resistance and conductivity, a laminated DLC film using a DLC film and an N-DLC film was prepared and its electrical resistivity and friction coefficient were measured. The resistivity of the 4 and 8 layer DLC films was about half that of the DLC film. The DLC film, the 4 layer and 8 layer DLC films showed lower friction coefficient than the N-DLC film.