Crystallinity improvement of MoS2 film by<br />long throw high temperature sputtering with MoS2 target

Presentation information

Oral presentation

17 Nanocarbon Technology » 17.3 Layered materials

Thu. Sep 7, 2017 1:45 PM - 7:30 PM C11 (Office 1)

Masaki Tanemura(Nagoya Inst. of Tech.), Yasuhide Ohno(Tokushima univ)

2:30 PM - 2:45 PM

〇Takuro Sakamoto¹, Takumi Ohashi¹, Iriya Muneta¹, Kuniyuki Kakushima¹, Kazuo Tsutui¹, Hitoshi Wakabayashi¹ (1.Tokyo Tech)

Keywords:Molybdenum disulfide, Sputtering, Long throw