[7p-PA10-1~5] Joint Session M "Phonon Engineering"（Poster）

[7p-PA10-1] Influence of sample size on thermal diffusivity measurement by ac calorimetry

〇(M1)Yuya Ota^1,2, Naomi Yamasita¹, Navaneethan Mani¹, Hirosi Inokawa^1,2, Masaru Shimomura², Kenji Murakami², Takanobu Watanabe³, Hiroya Ikeda^1,2 (1.RIE Shizuoka Univ., 2.Shizuoka Univ., 3.Waseda Univ.)

Keywords:thermal diffusivity measurement, Aluminum Nitride, AC calorimetry measurement

In order to measure the thermal diffusivity of thin film materials, we have constructed a thermal diffusivity measurement technology incorporating a Thermographic camera in the AC calorimetry method. In order to ascertain how the size of the sample to be measured affects the obtained thermal diffusivity, the thermal diffusivity was measured using AlN with different sample sizes with widths of 10 mm and 75 mm. The thermal diffusivity of samples with widths of 10 mm and 75 mm were 1.3×10^-4m²/s and 7.0×10^-5m²/s, respectively. From this, it is conceivable that thermal reflection or thermal radiation at the edge of the sample is influenced.