[7p-PA10-1~5] Joint Session M "Phonon Engineering"（Poster）

[7p-PA10-5] Study on Seebeck coefficient of co-doped SOI layers

〇(M1)Yuki Narita¹, Yuhei Suzuki¹, Faiz Salleh², Hiroya Ikeda¹ (1.Shizuoka Univ., 2.Maraya Univ.)

Keywords:semiconductor, silicon

Figure of merit of thermoelectric is in proportion to electrical conductivity and the square of Seebeck coefficient and inversely proportional to thermal conductivity. In semiconductor, these values are dependent on carrier concentration and it is difficult to control independently.Co-doped Si is expected to reduce the thermal conductivity while maintaining the electrical characteristics by controlling the carrier concentration. In the presentation, we consider the co-doping effect from the result of current-voltage measurement and Seebeck coefficient measurement of co-doped Si mixed donor and acceptor.