[7p-PA2-1~14] 3.15 Silicon photonics

△ [7p-PA2-14] Deposition of Cerium-substituted Yttrium Iron Garnet on Silicon Substrate by Metal Organic Decomposition Method and Sputtering Method

〇(M1)Michiomi Noguchi¹, Yuya Shoji¹, Tetsuya Mizumoto¹ (1.Tokyo Tech.)

Keywords:cerium-substituted yttrium iron garnet, Metal Organic Decomposition

In order to integrate a optical nonreciprocal device such as an optical isolator, it is necessary to integrate a magneto-optical garnet on the optical waveguide platform having a small absorption and large magneto-optical coefficient in the near infrared wavelength band. We studied on forming the film of a cerium-substituted yttrium iron garnet ((CeY)₃Fe₅O₁₂ : Ce:YIG) directly on a silicon substrate used as a compact optical integrated circuit platform by a deposition method. In order to improve the crystallinity, a YIG (Y₃Fe₅O₁₂) seed layer was formed by Metal Organic Decomposition (MOD method), and a polycrystalline Ce:YIG was produced thereon by a sputtering method. As a result of measurement at a wavelength of 1550nm, ferromagnetism of the thin film was confirmed and the Faraday rotation coefficient was estimated to be -2800 deg/cm corresponding to 62% of the single crystal.