[7p-PA2-1~14] 3.15 Silicon photonics

[7p-PA2-4] Analysis of Back Scattering for Silicon Optical Waveguide

〇Tatsuya Usuki¹, Yohei Sobu¹, Seok-Hwan Jeong¹, Tsuyoshi Horikawa¹ (1.PETRA)

Keywords:silicon waveguide, light scattering, numerical analysis

We study the relationship between the scattering loss and the backscattering due to the side roughness of the silicon waveguide. In this report, in addition to the past measurement data, the backscattering of two samples having the same sectional shape but different losses are newly measured, and we try to obtain the ratio between the backscattering over unit length and the loss over unit length. As expected by numerical analysis, it became clear that the ratio of reflection amount and loss in TE mode is as large as 10% to 40%.