[7p-PA4-1~9] 8.5 Plasma nanotechnology

△ [7p-PA4-3] Influence of Pressure on Isolated Columnar Structures Fabricated by
Glancing-angle Sputtering

〇(M1)Hiroki Izumisawa¹, Yasusi Inoue¹, Osamu Takai² (1.Chiba Inst., 2.Kanto Gakuin Univ.)

Keywords:thin film