[7p-PA4-1~9] 8.5 Plasma nanotechnology

[7p-PA4-7] Classification of cluster behavior in plasma by spectral analysis

〇Masaharu Shiratani¹, Takashi Kojima¹, Susumu Toko¹, Kazuma Tanaka¹, Hyunwoohg Seo¹, Naho Itagaki¹, Kazunori Koga¹ (1.Kyushu Univ.)

Keywords:plasma process, nanoparticle

Nanoparticles (clusters) in processing plasma often have impact on process results. We report that we can evaluate cluster transport using power spectrum analysis of laser light scattering from clusters.