[7p-PA7-1~25] 9.2 Nanowires and Nanoparticles

△ [7p-PA7-9] Formation of an aluminum nanowire by local anodization

〇(M2)Takahiro Fukumoto¹, Moriya Masataka², Mizugaki Yoshinao², Tadaki Daisuke³, Ma Teng³, Hirano-Iwata Ayumi³, Niwano Michio⁴, Kimura Yasuo¹ (1.Tokyo Univ. of Technol., 2.Univ. of Electro-Comm., 3.Tohoku Univ., 4.Tohoku Fukushi Univ.)

Keywords:anodization, selforganization, hybrid process

We demonstrated fabrication of an aluminum nanowire from a microwire through a hybrid process between photolithography technique and anodization process. We monitored a resistance of an aluminum nanowire during anodization to control its width. We fabricated an Al nanowire of about 135 nm in width.