[7p-PA9-1~9] 15.5 Group IV crystals and alloys

[7p-PA9-4] XPS evaluation of Si cap/Ge quantum dots stack layer structures

Tadashi Hanada¹, Akihiro Tanaka², Emi Shindou², Xuejun Xu¹, 〇Kentarou Sawano¹, Hiroshi Nohira¹, Takuya Maruizumi^1,2 (1.Tokyo City Univ. ARL, 2.Tokyo City Univ. NRC)

Keywords:Ge quantum dot, XPS