[7p-PB1-1~8] 6.5 Surface Physics, Vacuum

[7p-PB1-7] Effects of Ti Seed Layers on the Dewetting Phenomena of Au Films Deposited on Si Oxide Substrates

〇Masao Kamiko¹, So-Mang Kim², Sang-Mo Koo², Yoshitaka Mitsuda¹, Jae-Geun Ha² (1.IIS, The Univ. of Tokyo, 2.Kwangwoon Univ.)

Keywords:dewetting, self-organization, metallic thin film

Influences of thin Ti seed layer (1 nm) on the dewetting phenomena of Au thin film (5 nm) grown onto amorphous SiO₂ substrates by magnetron sputtering has been studied and compared. The samples were deposited at room temperature and post-annealed at 250–450 degrees Celsius for 5 hours under the chamber vacuum condition. Atomic force microscopy results indicated that the introducing of Ti seed layers between the substrate and Au layer promoted and provided a certain change in the dewetting process of Au film.