[7p-S21-1~22] 13.10 Compound solar cells

[7p-S21-21] Evaluation of the crystal formation from the residual deposition on the GaAs substrate after epitaxial lift-off process

〇(M2)Tatsuya Nakata¹, Kentaroh Watanabe², Hassanet Sodabanlu², Naoya Miyashita², Yoshitaka Okada^1,2, Yoshiaki Nakano^1,2, Masakazu Sugiyama^1,2 (1.Univ. Tokyo, 2.RCAST)

Keywords:III-V compound semiconductors, thin-film solar cell, epitaxial lift-off