[7p-S45-1~14] 3.7 Laser processing

△ [7p-S45-12] Femtosecond laser induced modification at the surface of diamond single crystal and its change with annealing

〇Masaru Nimura¹, Hiroki Kawakami¹, Tomoyuki Ueki¹, Takuro Tomita¹, Tatsuya Okada¹, Yasuhiro Tanaka² (1.Tokushima Univ., 2.Kagawa Univ.)

Keywords:diamond, femtosecond laser

Modifications were introduced by the irradiation of femtosecond laser pulses along [100] lines on the (001) surface of diamond single crystal. A thin film of aluminum was deposited on the laser-irradiated surface. Cross-sectional TEM revealed that the laser-modified regions were composed of crystalline diamond, graphite, amorphous carbon and aluminum crystals. After annealing, the laser-modified regions amorphized.