[8a-A402-1~9] 8.5 Plasma nanotechnology

[8a-A402-5] Silicon Plasma Nitiridation with Gold Nanoparticles on Surface

〇Takeshi Kitajima¹, Yuuki Kariya¹, Toshiki Nakano¹ (1.Nat. Def. Acad.)

Keywords:Nanoparticle, Catalyst, Plasma CVD

Catalytic property of gold nanoparticles (Au-NP) is interested recent years. We investigate the catalysis of the Au-NP in a film growth using low temperature plasma. The aim of the work is to ease the plasma induced damage and enhance the processing rate. Au-NP on Si(100) sample with a native oxide is formed by an e-beam evaporation. N₂ plasma exposure to the sample nitrides the Si surface as fast as the case without Au-NP. Catalysis of Au-NP is assured.