[8a-A405-1~12] 3.9 Terahertz technologies

[8a-A405-10] Study on THz antenna-coupled microbolometer with a fine meander structure

〇Norihisa Hiromoto¹, Amit Banerjee², Makoto Aoki³, Hiroaki Satoh², Hiroshi Inokawa² (1.Shizuoka Univ.-GSST, 2.Shizuoka Univ.-RIE, 3.NICT)

Keywords:terahertz, antenna-coupled detector, meander structure

Terahertz (THz) detectors with high detectivity are crucial in many practical applications. We have developed a novel antenna coupled microbolometer operated in 1 THz region, but its performance was almost the same level with the other uncooled detectors due to low temperature coefficient of resistance (TCR) of a thin Ti thermistor line. In this study, we have made a THz antenna-coupled microbolometer with a meander Pt thermistor line which TCR has shown smaller dependence on the line width.