[8a-A410-1~8] 3.7 Laser processing

[8a-A410-7] Formation of THz-FEL induced periodic structures on surfaces of Si substrates

〇Takeshi Nagashima¹, Akinori Irizawa², Masaki Hashida^3,4, Atsushi Higashiya¹, Shigemasa Suga², Shuji Sakabe^3,4 (1.Setsunan Univ., 2.Osaka Univ., 3.Kyoto Univ., 4.ICR, Kyoto Univ.)

Keywords:LIPSS, intense terahertz wave, THz-FEL

Fabrication of laser-induced periodic surface structures (LIPSS) is one of promising ways to impart functionality on the material surface. However, the mechanism of LIPSS formation is still unclear. In this study, LIPSS produced by the irradiation of intense THz-FEL with wavelengths ranging from 52 to 100 μm are investigated, which would be useful in discussing the mechanism of LIPSS formation.