09:15 〜 09:30
▼ [8a-A502-2] Multi-sample pH sensor based on chemical imaging sensor with a partially etched structure
キーワード：LAPS, partially etched
A multi-sample pH sensor, in which a partially etched structure of light-addressable potentiometric sensor (LAPS) accommodates small-droplet samples was fabricated. A thin SiO2 film was formed on the etched surface as a pH-sensitive layer by thermal oxidation. As a result, the pH sensitivity of the SiO2 surface in the etched region was 27 mV/pH, calculated from the shift of current-voltage curves. Additionally, this structure has result in visualizing different pH buffer solution with each cavity containing 2 – 4 μL of sample droplet. Thus, the partially etched LAPS sensor plate for multi-sample measurement is an advantageous pH sensor in terms of robustness and simplicity of fabrication as well as the possibility of high performance.