[8a-A502-1~12] 12.7 Biomedical Engineering and Biochips

▼ [8a-A502-2] Multi-sample pH sensor based on chemical imaging sensor with a partially etched structure

〇(D)HoangAnh Truong¹, Carl Frederik Werner², Koichiro Miyamoto², Tatsuo Yoshinobu^1,2 (1.Biome. Tohoku Univ., 2.Electr. Tohoku Univ.)

Keywords:LAPS, partially etched

A multi-sample pH sensor, in which a partially etched structure of light-addressable potentiometric sensor (LAPS) accommodates small-droplet samples was fabricated. A thin SiO₂ film was formed on the etched surface as a pH-sensitive layer by thermal oxidation. As a result, the pH sensitivity of the SiO₂ surface in the etched region was 27 mV/pH, calculated from the shift of current-voltage curves. Additionally, this structure has result in visualizing different pH buffer solution with each cavity containing 2 – 4 μL of sample droplet. Thus, the partially etched LAPS sensor plate for multi-sample measurement is an advantageous pH sensor in terms of robustness and simplicity of fabrication as well as the possibility of high performance.