[8a-A504-1~13] 6.1 Ferroelectric thin films

△ [8a-A504-6] In-situ observation of crystallographic deformation of Pb(Zr,Ti)O₃ piezoelectric thin films via the inverse piezoelectric effect

〇(P)Geng Tan¹, Kazuki Maruyama¹, Yuya Kanamitsu¹, Shintaro Nishioka¹, Tomoyuki Koganezawa², Toshihito Umegaki¹, Hirotaka Hida¹, Isaku Kanno¹ (1.Kobe Univ., 2.JASRI)

Keywords:piezoelectric thin films, in-situ X-ray diffraction, MEMS

In order to enhance the piezoelectric property, it is essential to conduct a quantitative investigation of piezoelectric effect on crystallographic deformation of piezoelectric thin films. In the present study, we did the measurement of lattice deformation of PZT thin films by applying DC electrical field using the synchrotron X-ray diffraction. The crystal structure change in the out of plane and also in-plane was systematically investigated by changing the bias voltages. In the consequence, we confirmed that c-axis lattice expanded and contracted while applying the forward and reverse bias, respectively. The deformation changes linearly as a function of bias voltage and demonstrates reversibility.