10:00 AM - 10:15 AM
[8a-C19-3] Enhancement of Low-Temperature Solid Phase Crystallization of Amorphous GeSn on Insulator by Weak Laser Irradiation
Keywords:semiconductor, laser annealing, solid phase crystallization
Oral presentation
15 Crystal Engineering » 15.5 Group IV crystals and alloys
Fri. Sep 8, 2017 9:30 AM - 11:45 AM C19 (C19)
Kentarou Sawano(Tokyo City Univ.)
10:00 AM - 10:15 AM
Keywords:semiconductor, laser annealing, solid phase crystallization