The 78th JSAP Autumn Meeting, 2017

Presentation information

Print

Oral presentation

15 Crystal Engineering » 15.5 Group IV crystals and alloys

[8a-C19-1~9] 15.5 Group IV crystals and alloys

Fri. Sep 8, 2017 9:30 AM - 11:45 AM C19 (C19)

Kentarou Sawano(Tokyo City Univ.)

10:00 AM - 10:15 AM

[8a-C19-3] Enhancement of Low-Temperature Solid Phase Crystallization of Amorphous GeSn on Insulator by Weak Laser Irradiation

〇Takayuki Sugino1, Kenta Moto1, Ryo Matsumura1, Masanobu Miyao1, Hiroshi Ikenoue1, Taizoh Sadoh1 (1.Kyushu Univ.)

Keywords:semiconductor, laser annealing, solid phase crystallization