[8a-PA1-1~17] 6.2 Carbon-based thin films

△ [8a-PA1-1] Growth modes of diamond (111) films by hot-filament CVD

〇(M2)Shohei Kanada¹, Yusuke Wakui¹, Tsubasa Matsumoto¹, Osamu Ariyada², Toshiharu Makino³, Masahiko Ogura³, Satoshi Yamasaki³, Norio Tokuda¹, Takao Inokuma¹ (1.Grad. School of Natural Sci. & Tech. Kanazawa Univ., 2.Arios Inc., 3.AIST)

Keywords:diamond, hot-filament CVD, growth modes