[8a-PA1-1~17] 6.2 Carbon-based thin films

[8a-PA1-12] Structural analysis of a-CN_x:H films fabricated from the decomposition of CH₃CN

〇Chitose Sekizaki¹, Dong Fu¹, Hidetoshi Saito¹, Haruhiko Ito¹ (1.Nagaoka Univ.)

Keywords:Carbon Nitride