[8a-PA1-1~17] 6.2 Carbon-based thin films

[8a-PA1-2] Deposition of phosphorus-doped polycrystalline diamond films using organic phosphorus solution by Hot-Filament CVD

〇(M1)Daisuke Arikawa¹, Yuki Katamune², Akira Izumi¹ (1.Kyushu Inst. Tech., 2.Frontier Research Academy for Young Researchers, Kyushu Inst. Tech.)

Keywords:diamond, Hot-Filament CVD