The 78th JSAP Autumn Meeting, 2017

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Poster presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[8a-PA1-1~17] 6.2 Carbon-based thin films

Fri. Sep 8, 2017 9:30 AM - 11:30 AM PA1 (P)

9:30 AM - 11:30 AM

[8a-PA1-9] Application of a-C:H films fabricated by PIG-PECVD for Low-E films

〇Yusuke Kondo1, Yoshiharu Kakehi1, Kazuo Satoh1, Yong-Gu Shim2 (1.ORIST, 2.Osaka Pref. Univ.)

Keywords:Diamond Like Carbon, optical thin film, Low-E film