[8a-PA2-1~17] 6.4 Thin films and New materials

[8a-PA2-1] Preparation of niobium- and tungsten-doped vanadium oxide films for bolometer infrared sensors

Rei Kitano¹, Junpei Nishi¹, Atsushi Hagiwara¹, 〇Takahiro Himuro¹, Yoji Saito¹ (1.Seikei Univ.)

Keywords:bolometer, phase transformation, vanadium oxide

We newly fabricated the Nb- and W-doped vanadium oxide (VO₂) films for bolometric infrared sensors. In this study, we tried to optimize the Nb and W doping content in VO₂ films, and investigated their electrical properties.