[8a-PA2-1~17] 6.4 Thin films and New materials

[8a-PA2-15] B doping effects on hardness and film structures of nanocomposite AlBN thin films

〇Seiya Uchida¹, Tomohiro Yoshida², Kouki Murasawa³, Yasuo Fukui³, Masatoshi Sakurai³, Masaki Kudo⁴, Takaki Toriyama⁴, Tsuyoshi Yoshitake¹ (1.Kyushu Univ., 2.Fukuoka Industrial Technology Center, 3.OSG Corp, 4.Kyushu Univ)

Keywords:semiconductor, hard-coating