[8a-PA2-1~17] 6.4 Thin films and New materials

[8a-PA2-2] Raman spectroscopy of epitaxially grown VO₂ films

〇Takeshi Kusumori¹, Setsuo Nakao¹ (1.AIST Chubu)

Keywords:vanadium dioxide, epitaxy, Raman spectroscopy

Vanadium dioxide shows phase transition from metal to insulator, which has been attributed to a crystallographic deformation from tetragonal to monoclinic system. Raman spectroscopy might be one of the powerful tool to analyze these crystallographic characteristics from microscopic point of view. Here we present characterizations of VO2 films fabricated on various sapphire substrate which allows various crystallographic orientations of VO2.