[8a-PA2-1~17] 6.4 Thin films and New materials

[8a-PA2-4] Nitrogen doping to ZnO film by N radicals generated on heated Ir wire surface

Shotaro Ono¹, Taro Saito¹, Ryuta Iba¹, 〇Kanji Yasui¹ (1.Nagaoka Univ. Technol.)

Keywords:zinc oxide, catalytic reaction, nitrogen doping

In order to dope nitrogen atoms into ZnO films by a CVD method using high energy H₂O generated by catalytic reaction, the supply of the nitrogen radicals generated by the decomposition of NO gas on heated Ir wire surface was tried. From X-ray photoelectron spectroscopy, it was found that the amount of the Zn-N component of N-1s increased by the use of the heated Ir wire.