9:30 AM - 11:30 AM
[8a-PA4-13] High density IGZO film by sputtering deposition at room temperature
Keywords:IGZO, sputter
Presentation information
Poster presentation
21 Joint Session K » Joint Session K "Wide bandgap oxide semiconductor materials and devices"（Poster）
[8a-PA4-1~31] Joint Session K "Wide bandgap oxide semiconductor materials and devices"（Poster）
Fri. Sep 8, 2017 9:30 AM - 11:30 AM PA4 (P)