9:30 AM - 11:30 AM
[8a-PA4-13] High density IGZO film by sputtering deposition at room temperature
Keywords:IGZO, sputter
Poster presentation
21 Joint Session K » Joint Session K "Wide bandgap oxide semiconductor materials and devices"(Poster)
Fri. Sep 8, 2017 9:30 AM - 11:30 AM PA4 (P)
9:30 AM - 11:30 AM
Keywords:IGZO, sputter