[8a-PA4-1~31] Joint Session K "Wide bandgap oxide semiconductor materials and devices"（Poster）

[8a-PA4-6] Decrease in sheet resistance of zinc oxide thin films by electrochemical treatment

〇Hiroki Hata¹, Tomoya yokoyama¹, Koji abe¹ (1.Nagoya Inst of Technology)

Keywords:Zinc Oxide

It is known that resistance decreases when a zinc oxide thin film is annealed in a hydrogen atmosphere. However, the annealing treatment is unsuitable for heat-sensitive substrates such as plastics. It is known that the resistance of zinc oxide changes when electrochemical treatment is performed. Therefore, in this study, changes in sheet resistance and transmittance of the sample were measured when the positive or negative of the voltage applied to the sample was quickly switched using a function generator.