09:30 〜 11:30
▲ [8a-PB2-1] 3D digital holographic semiconductor metrology using Fourier Modal Method
キーワード：metrology, TSOM, Fourier modal method
Through-focus Scanning Optical Microscope (TSOM) technology, which has been attracting much attention in the field of semiconductor measurement recently, using a conventional optical microscope, collects 2D images at multiple focal positions for creating 3D data space and extracts intensity profile from them. It is a breakthrough technology for the inspection and measurement of a recent complicated 3D structure semiconductor.
However, since this TSOM technology uses physical z-axis movement, jittering necessarily occurs, which seriously affects image reliability. Therefore, in this paper, we propose a 3D digital holography technique, which can calculate the diffractive light wave information of the semiconductor sample in the stationary state without such physical movement.
However, since this TSOM technology uses physical z-axis movement, jittering necessarily occurs, which seriously affects image reliability. Therefore, in this paper, we propose a 3D digital holography technique, which can calculate the diffractive light wave information of the semiconductor sample in the stationary state without such physical movement.