The 78th JSAP Autumn Meeting, 2017

Presentation information

Print

Poster presentation

8 Plasma Electronics » 8.2 Plasma measurements and diagnostics

[8a-PB3-1~8] 8.2 Plasma measurements and diagnostics

Fri. Sep 8, 2017 9:30 AM - 11:30 AM PB3 (P)

9:30 AM - 11:30 AM

[8a-PB3-5] Spatial structure of radio-frequency capacitive coupled plasma using Ar-O2 mixture gases

〇Masaya Takasaki1, Ohtsu Yasunori1, Schulze Julian2 (1.Saga Univ., 2.West Virginia Univ.)

Keywords:plasma