[8a-S22-1~9] 13.8 Compound and power electron devices and process technology

[8a-S22-6] Residual stress evaluation of single crystal diamond bonded to Si substrate

〇Jianbo Liang¹, Satoshi Masuya², Makoto Kasu², Yan Zhou³, Filip Gucmann³, Manikant Singh³, James Pomeroy³, Martin Kuball³, Naoteru Shigekawa¹ (1.Osaka City Univ., 2.Saga Univ., 3.Univ. of Bristol)

Keywords:diamond, Raman spectral