2:15 PM - 2:30 PM
△ [8p-A402-5] Comparison of magnetron sputtering plasmas employing solid and liquid tin targets
Keywords:plasma
Presentation information
Oral presentation
8 Plasma Electronics » 8.7 Plasma phenomena, emerging area of plasmas and their new applications
[8p-A402-1~12] 8.7 Plasma phenomena, emerging area of plasmas and their new applications
Fri. Sep 8, 2017 1:15 PM - 4:15 PM A402 (402+403)
Toshiro Kaneko(Tohoku Univ.)