[8p-A411-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[8p-A411-10] Chemical Compatibility Study of Polyarylsulfone Membrane Filter

〇Tomoyuki Takakura¹, Shuichi Tsuzuki¹ (1.Nihon Pall Ltd.)

Keywords:filter, semiconductor, filtration

Filtration plays an important role for removing particles in the chemicals used for the semiconductor wet processes. Since filters are used in various kinds of chemicals, it is necessary to confirm the compatibility to the chemical to be used. In this presentation, we report on compatibility evaluation of polyarylsulfone membrane filters to dilute sulfuric acid and hydrogen peroxide solutions, which are commonly used in the wet processes, by means of forward flow test which is one of filter’s integrity evaluation methods.