[8p-A411-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[8p-A411-8] Effects of brush rotation on a friction generated by scrubbing a PVA brush without skin layer

〇(M2)Masayoshi Ito¹, Toshiyuki Sanada¹, Akira Hukunaga², Hiyama Hirokuni² (1.Shizuoka univ, 2.Ebara Corporation)

Keywords:PVA brush

Polyvinyl acetal (PVA) brushes are widely used in the post CMP cleaning. However, the contact conditions between the PVA brush and surface are not clear. The PVA brush was generally covered with skin layer which has a lower porosity than the inner structure. We considered that the skin layer may also affects the contact condition. In this study, we measured the shear forces generated by a no skin layer PVA brush sliding with different sliding speed and brush rotation speed.