The 78th JSAP Autumn Meeting, 2017

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Oral presentation

9 Applied Materials Science » 9.3 Nanoelectronics

[8p-A412-1~12] 9.3 Nanoelectronics

Fri. Sep 8, 2017 1:00 PM - 4:15 PM A412 (412)

Takahide Oya(Yokohama National Univ.), Seiya Kasai(Hokkaido Univ.)

2:30 PM - 2:45 PM

[8p-A412-7] Basic research on correlation between embedded convex nanostructure in gate and current-voltage characteristics of MOSFET

〇Katsumi Shimizu1, Morihisa Hoga2, Yasuyuki Ohyagi3, Shumpei Nishio3, Makoto Naruse4, Tsutomu Matsumoto5, Seiya Kasai1 (1.Hokkaido Univ., 2.Compass Two-One, 3.DNP Co., Ltd., 4.NICT, 5.Yokohama Natl. Univ.)

Keywords:Nano-artifact metrics, device simulation