The 78th JSAP Autumn Meeting, 2017

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[8p-A504-1~13] 6.1 Ferroelectric thin films

6.1と13.3と13.5のコードシェアセッションあり

Fri. Sep 8, 2017 1:30 PM - 5:00 PM A504 (504+505)

Wataru Sakamoto(Nagoya Univ.), Takeshi Yoshimura(Osaka Pref. Univ.)

2:30 PM - 2:45 PM

[8p-A504-5] Investigation of the process window in MOCVD growth BiFeO3 thin films

Nao Yoshimura1, Hironori Fujisawa1, Seiji Nakashima1, Masaru Shimizu1 (1.Univ. of Hyogo)

Keywords:MOCVD, BFO thin films, process window