[8p-C14-1~7] 6.5 Surface Physics, Vacuum

[8p-C14-6] O 2p peak evolution and Si valence band change in plasma oxidation of Si(001)

〇Kazuho Morita¹, Sakura Takeda¹, Tatsuya Ebato¹, Yudai Higa¹, Akiho Fujinaka¹, Natsuki Morimoto¹, Masatoshi Yoneda¹, Artoni Kevin R. Ang², Xin Tan¹, Hiroshi Daimon¹ (1.NAIST, 2.Nagoya Inst.)

Keywords:silicon, ARPES